sti etch back
thispaper,weintroduceamathematicalmodelforchemicalmechanicalpolishing#CMP#ofreversetoneetchbackshallowtrenchisolation#STI#structures.,6Inthiswork,amathematicalmodelforreversetoneetchbackSTICMPbasedondensityandstepheightdependentoxideandnitriderem...
半導體& ETCH 知識,你能答對幾個?
- shallow trench isolation半導體
- shallow trench isolation解釋
- deep trench isolation process
- pad oxide半導體
- 屏蔽氧化層
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- 淺溝槽隔離
- sti locos
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- shallow trench isolation半導体
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- deep trench isolation
- sti divot formation
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- sti locos
2020年10月21日—答:STI:ShallowTrenchIsolation(淺溝道隔離),.STI可以當做兩個組件(device)間的阻隔,避免兩個組件間的短路.
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